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Rear Surface Passivation of Silicon Solar Cell with AlON Layer by Reactive Magnetron Sputtering
Rear Surface Passivation of Silicon Solar Cell with AlON Layer by Reactive Magnetron Sputtering
2012
Sun-Woo Moon
Eunkyeom Kim
Won Woong Park
Kyunghoon Kim
Sung Min Kim
Donghwan Kim
Seunghee Han
Keywords:
Sputter deposition
Passivation
Solar cell
Mineralogy
Composite material
Silicon
Materials science
silicon solar cell
Optoelectronics
Sputtering
reactive magnetron
Correction
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