Distinctive features of thermoelastic dissipation in microbeam resonators at nanoscale

ABSTRACTIn this work, thermoelastic damping in microbeam resonators is evaluated using the generalized thermoelasticity theory based on the dual-phase-lagging thermal conduction model with relaxation between temperature increment and thermal expansion. An explicit formula of thermoelastic damping has been derived. Influences of various affecting factors on thermoelastic damping, such as the beam height, aspect ratio, and relaxation time between temperature increment and thermal expansion, are examined. Numerical results show that the thermoelastic damping, obtained by the generalized thermoelasticity theory in the present study, exhibits distinctive features at nanoscale. This work reveals that non-Fourier thermal conduction and relaxation between temperature increment and thermal expansion may play a nonnegligible role at nanometer scale.