Ln2NiO4+δ (Ln = La, Pr, Nd) coatings deposited by reactive magnetron sputtering as cathode material for intermediate temperature solid oxide fuel cell

Abstract This work focuses on the comparison of Ln-Ni-O coatings (Ln = La, Nd, Pr) deposited by reactive magnetron sputtering using Plasma Emission Monitoring (PEM) which allows high deposition rate. Each layer is deposited by different steps. The optimal regulation setpoint for oxide rare-earth deposition is determined and then the current dissipated on the nickel target is adjusted to obtain the convenient Ln/Ni ratio and to achieve the K 2 NiF 4 structure. After an appropriate annealing treatment, all coatings exhibit crystalline structures, which depend on the Ln/Ni ratio. Due to the instability of Pr 2 NiO 4 structure at intermediate temperatures, the crystallization step of praseodymium nickelate is performed at higher temperature than the other materials. This further thermal treatment implies a more porous structure. Each coating exhibits interesting properties. Electrical and electrochemical characterizations performed on these deposits prove better properties of the praseodymium nickelate coating.