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Investigation of Electron Beam Induced Effects on Nano Crystalline Oxide Semiconductor Deposited by Sputtering (1)
Investigation of Electron Beam Induced Effects on Nano Crystalline Oxide Semiconductor Deposited by Sputtering (1)
2014
Michiko Yano
Keywords:
Oxide
Sputtering
Cathode ray
Nano-
Analytical chemistry
Crystal
Semiconductor
Materials science
oxide semiconductor
nano crystalline
Optoelectronics
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