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Effect of sputtering conditions on internal stress of Al 1-x Sc x N thin films
Effect of sputtering conditions on internal stress of Al 1-x Sc x N thin films
2021
Kohei Miyaji
Takeshi Yoshimura
Hagiwara Takuto
Norifumi Fujimura
Keywords:
Thin film
Materials science
Sputtering
Composite material
internal stress
Correction
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