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Morphological control of nanostructured Ge films in high Ar-gas-pressure plasma sputtering process for Li ion batteries
Morphological control of nanostructured Ge films in high Ar-gas-pressure plasma sputtering process for Li ion batteries
2021
Junki Hayashi
Kenta Nagai
Yuma Habu
Yumiko Ikebe
Mineo Hiramatsu
Ryota Narishige
Naho Itagaki
Masaharu Shiratani
Yuichi Setsuhara
Giichiro Uchida
Keywords:
Ion
Chemical engineering
gas pressure
Sputtering
Plasma
Materials science
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