Electron-impact total ionization cross sections of SFx(x = 1–5)

Abstract Total cross sections for electron impact ionization are necessary quantities for numerical modeling of plasma chemistry and for quantitative mass-spectrometric gas analysis. Theoretical cross sections for SF, SF 2 , SF 3 , SF 4 , and SF 5 are calculated by the recently developed binary-encounter-Bethe (BEB) model. The BEB model combines a modified form of the Mott cross section and the Bethe cross section. The results are compared with experimental cross sections for SF 3 and SF 5 free radicals. In view of the success of the BEB method for SF 6 and many other molecules, it is expected that the results presented here will provide reliable total ionization cross sections for SF x ( x = 1–5).