Research on fabricating technique of Ba-Al-S:Eu sputtering target

Abstract Ba-Al-S-Eu sputtering target for blue emitting phosphors was prepared by powder sintering method. XRD patterns showed that the main components of the target were barium tetra aluminum sulfide (BaAl 4 S 7 ), bariutm sulfide (BaS), and europium sulfide (EuS). In the samples, part of the barium and aluminum are formed into barium aluminum oxide (BaAl 2 O 4 ) with the impurity element of oxygen. The PL characteristic spectra of the target showed the 470 nm blue emission obviously, and the Ba-Al-S thin films also transmitted a purple-blue emission at the position of 440 nm. The results indicated that this method was suitable for the fabrication of the Ba-Al-S:Eu sputtering target.