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HRXRD analysis of bonded Si / Si interface
HRXRD analysis of bonded Si / Si interface
2016
Zoltán Balogh-Michels
Kai Zweiacker
Y Zhang
Arik Jung
C. Flötgen
G. Chahine
Alex Dommann
Rolf Erni
Hans von Känel
Antonia Neels
Keywords:
Chemistry
Inorganic chemistry
Crystallography
Dislocation
Correction
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