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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
1991
W.O. Hofer
R. Behrisch
W. Hauffe
Keywords:
Particle
Optoelectronics
Materials science
Sputtering
Correction
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