Old Web
English
Sign In
Acemap
>
Paper
>
Applications and systems for ion beam milling, sputtering and doping
Applications and systems for ion beam milling, sputtering and doping
1991
I. Hashimoto
Y. Ono
T. Gejo
Keywords:
Ion beam
Thin film
Ion milling machine
Sputtering
Doping
Thin-film transistor
Electrical engineering
Analytical chemistry
Materials science
Optoelectronics
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]