Old Web
English
Sign In
Acemap
>
Paper
>
Process Analysis sublimation deposition apparatus - sputtering using inductively coupled plasma
Process Analysis sublimation deposition apparatus - sputtering using inductively coupled plasma
2013
Yeong-Gun Yu
Ji-Seong Choe
Jeong-Hun Ju
Keywords:
Sublimation (phase transition)
process analysis
Sputtering
Deposition (law)
Analytical chemistry
Materials science
Inductively coupled plasma
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]