Cross-Section Analysis of a Laminated Film by Dual FIB ToF-SIMS

Three-dimensional microanalysis for a minute structure that consists of organic compounds and polymers is important to make progress and to practically use the method to analyze a micro-nanometer order area. We developed a novel three-dimensional microanalysis method by means of focused ion beams (FIB) for section processing (shave-off scanning) and ToF-SIMS for mapping method. In this study, in order to obtain three-dimensional sample image, we used a laminated film as a sample and examined two-dimensional ToF-SIMS mapping over the cross-section created by shave-off scanning. We could obtain ion map and ToF-Mass spectra of polymer samples. This result suggested that shave-off section processing can suppress the damage by primary ions. [DOI: 10.1380/ejssnt.2011.426]