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Thermodynamic calculations for chemical vapor deposition of silicon carbide
Thermodynamic calculations for chemical vapor deposition of silicon carbide
1985
Kazuo Minato
Kousaku Fukuda
Katsuichi Ikawa
Keywords:
energy source
Chemical engineering
surface coating
Carbide
Phase diagram
Gibbs free energy
Materials science
Chemical vapor deposition
Silicon carbide
Deposition (phase transition)
Correction
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