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Development of Magnet-Free Sputtering System for Dielectric Film Deposition with Surface-Wave Excited Plasma
Development of Magnet-Free Sputtering System for Dielectric Film Deposition with Surface-Wave Excited Plasma
2013
Tomonori Noda
Toshiya Hagihara
Hirotaka Toyoda
Keywords:
Magnet
Deposition (law)
Materials science
Dielectric
Excited state
Surface wave
Atomic physics
Plasma
Sputtering
Correction
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