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Development of X-ray non-rectangular phase-gratings by LIGA process and status of hyper-resolution X-ray phase imaging
Development of X-ray non-rectangular phase-gratings by LIGA process and status of hyper-resolution X-ray phase imaging
2018
Katsumasa Ikematsu
Atsushi Momose
Juergen Mohr
Pascal Meyer
Talgat Mamyrbayev
Abrar Faisal
Keywords:
LIGA
Optics
X-ray
Materials science
phase imaging
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