Effects of annealing on hardness and corrosion resistance of 60NiTi film deposited by magnetron sputtering

Abstract Difficulty in shaping and deformation impedes the application of 60NiTi alloy showing high hardness and high corrosion resistance. To promote the application of 60NiTi alloy, a 60NiTi film was deposited on 316 stainless steel substrate by magnetron sputtering. The results showed that a 60NiTi film with excellent adhesion property and excellent thermal-shock resistance could be prepared by sputtering at 1.5 A and then annealing at 500 °C. The hardness of annealed 60NiTi film was comparable to bulk 60NiTi alloy, and its corrosion resistance was much better than that of the bulk 60NiTi alloy.