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Study on the electron gun for Micro-Column Electron Beam
Study on the electron gun for Micro-Column Electron Beam
2011
Fujino Takahiro
Koike Akifumi
Nagao Masayoshi
Yoshida Tomoya
Nishi Takashi
Murata Hidekazu
Sakai Kentaro
Neo Yoichiro
Aoki Toru
Mimura Hidenori
Keywords:
Electron gun
Cathode ray
X-ray lithography
Stencil lithography
Electron-beam lithography
Maskless lithography
Optics
Analytical chemistry
Materials science
multi beam
micro column
Correction
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