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Microstructure of Copper Films and its Oxides Prepared by Electron Beam Evaporation and ECR Plasmon Oxidation
Microstructure of Copper Films and its Oxides Prepared by Electron Beam Evaporation and ECR Plasmon Oxidation
2001
M. J. Campin
J. C. Barbour
J.W. Braithwaite
J. G. Zhu
Keywords:
Chemical engineering
Microstructure
Materials science
Metallurgy
Copper
Electron beam physical vapor deposition
Plasmon
Correction
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