Growth of FeSb2 thin films by magnetron sputtering

Abstract The detailed growth of FeSb 2 films formed on quartz (0001) substrates by magnetron sputtering is reported. FeSb 2 films with different orientations and compositions can be produced by adjusting the Ar working gas pressure and the substrate temperature. By employing FeSb 2 thin layers produced at different substrate temperatures as templates, -, - and -textured FeSb 2 films were produced under identical growth conditions. The thermoelectric properties of film samples grown at different temperatures were measured and the effects of Sb and FeSb impurities were investigated.