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FIB NANOPATTERNING OF METAL FILMS ON PMMA SUBSTRATES: NON-SPUTTERING MODE
FIB NANOPATTERNING OF METAL FILMS ON PMMA SUBSTRATES: NON-SPUTTERING MODE
2018
Luciana Tavares
Vadzim Adashkevich
Serguei Chiriaev
Horst-Günter Rubahn
Keywords:
Sputtering
Analytical chemistry
Materials science
Metal
Nanotechnology
Correction
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