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RIE of a T‐Shape Refractory Ohmic Contact for Self‐Aligned Heterojunction Bipolar Transistor
RIE of a T‐Shape Refractory Ohmic Contact for Self‐Aligned Heterojunction Bipolar Transistor
1990
J. M. Collumeau
J. Etrillard
J. F. Bresse
C. Dubon-Chevallier
Keywords:
Heterojunction bipolar transistor
Refractory
Ohmic contact
Reactive-ion etching
Analytical chemistry
Bipolar junction transistor
Chemistry
Heterostructure-emitter bipolar transistor
Electrical engineering
Optoelectronics
self alignment
Correction
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