Charged particle beam apparatus, a control method of a charged particle beam device

The present invention, positional relationship and the vacuum state of the sample around recognize, automatically selecting charged particle beam device reflected electron detector suitable for acquiring images of objects between the reflective electron detector and the sample an object of the present invention is to provide a. The charged particle beam apparatus according to the present invention, when the sample chamber of a vacuum degree higher sample and the reflected electron detector is distant selects all the reflection electron detector, reflected electrons and high sample vacuum in the sample chamber when the detector is approaching selects a reflection electron detector suitable for obtaining a composition image or topographic image. At low vacuum of the specimen chamber selects all of the reflective electron detector (see FIG. 7).