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Fabricating Flux Qubits With Electron Beam Lithography
Fabricating Flux Qubits With Electron Beam Lithography
2010
Erik Crowe
Anthony Przybysz
Hyeokshin Kwon
B. K. Cooper
R.P. Budoyo
Kaushik Mitra
Christopher J. Lobb
John Anderson
A.J. Dragt
F. C. Wellstood
V. Zaretski
Z. Kim
B.S. Palmer
Keywords:
X-ray lithography
Stencil lithography
Photolithography
Electron-beam lithography
Next-generation lithography
Maskless lithography
Interference lithography
Materials science
Extreme ultraviolet lithography
Optoelectronics
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