Effects of DC sputtering power on the properties of AZO films deposited at room temperature for CIGS photovoltaics

Yuandong Li,Demiao Wang,Jingping Lu,Hao Jin,Jian Zhou

Effects of DC sputtering power on the properties of AZO films deposited at room temperature for CIGS photovoltaics

2013

Yuandong Li
Demiao Wang
Jingping Lu
Hao Jin
Jian Zhou

Al:ZnO(AZO) films were deposited on glass substrate at different sputtering power. Effects of sputtering power on the properties of AZO films were investigated. And the electro-optical property of the AZO films gets optimum at 330W.

Keywords:

Sputtering
Copper indium gallium selenide solar cells
Materials science
Optoelectronics
Photovoltaics

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