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Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry
Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry
2009
Db Diana Mihailova
Dijk van J
Gjm Gerjan Hagelaar
Miglena Grozeva
Mullen van der Jjam
Keywords:
Sputtering
Atomic physics
Physics
Cathode
Correction
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