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Origin of Ferroelectric Phase in Undoped HfO 2 Films Deposited by Sputtering
Origin of Ferroelectric Phase in Undoped HfO 2 Films Deposited by Sputtering
2019
Terence Mittmann
Monica Materano
Patrick D. Lomenzo
Min Hyuk Park
Igor Stolichnov
Matteo Cavalieri
Chuanzhen Zhou
Ching-Chang Chung
Jacob L. Jones
Thomas Szyjka
Martina Müller
Alfred Kersch
Thomas Mikolajick
Uwe Schroeder
Keywords:
Sputtering
Optoelectronics
Ferroelectricity
Materials science
Hafnia
Correction
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