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Noble Metal Alloy Thin Films by Atomic Layer Deposition & Rapid Joule Heating
Noble Metal Alloy Thin Films by Atomic Layer Deposition & Rapid Joule Heating
2021
Yuanyuan Guo
Yiming Zou
Chunyu Cheng
Leyan Wang
Riko I. Made
Ronn Goei
Kwan Wee Tan
Shuzhou Li
Alfred Iing Yoong Tok
Keywords:
Thin film
Alloy
Metallurgy
Noble metal
Materials science
Joule heating
Atomic layer deposition
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