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OPTICS 1441 Fabrication of photonic crystals by deep x-ray lithography
OPTICS 1441 Fabrication of photonic crystals by deep x-ray lithography
1997
Guus A. Feiertag
W. Ehrfeld
H. Freimuth
H. Kolle
Hans Anton Lehr
Michael Schmidt
Mihail M. Sigalas
Costas M. Soukoulis
G. Kiriakidis
Torben Pryds Pedersen
Jürgen Kühl
Wolfgang Koenig
Scott C. Horst
S. Agarwala
Oliver King
John L. Fitz
S. Desmond Smith
Jeffrey B. Kortright
Anthony Warwick
Neil G. Smith
Diana L. Huffaker
D. G. Deppe
Jennifer Ann Riordan
Feng-Guo Sun
Lu Zhou
I. K. Shmagin
John F. Muth
R. M. Kolbas
Michael Mack
A. C. Abare
S. Keller
Larry A. Coldren
Umesh K. Mishra
Steven P. Denbaars
Carl E. Mungan
Melvin I. Buchwald
William C. Edwards
Richard I. Epstein
Timothy R. Gosnell
Hui Ling Cao
Shih Sheng Jiang
Shinji Machida
Yoshiharu Takiguchi
Yoshihiro Yamamoto
Keywords:
X-ray lithography
Crystal optics
Yablonovite
Materials science
Optoelectronics
Optics
Photonic crystal
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