P‐119: A Highly Precise Processes for Cathode Structure of CNT‐FEDs

In this work, the cathode structure of carbon nanotubes field emission display (CNT-FED) was fabricated by both the screen printing and photolithography processes. In order to get the precise cathode structure and lower processes cost (reducing one or two mask), bottom-exposure method based on existed CNT layer to be the mask, and then photo-sensitive dielectric paste was executed. Dielectric holes are made precisely directly over CNTs emitters, regardless of sintering shrinkage phenomenon and alignment deviation in the photolithography process. In this manuscript, 10″ normal triode structures are demonstrated.