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Directed self-assembly process integration – fin patterning
Directed self-assembly process integration – fin patterning
2015
Safak Sayan
Boon Teik Chan
Taisir Marzook
Nadia Vandenbroeck
Efrain Altamirano-Sanchez
Roel Gronheid
Arjun Singh
Paulina Rincon-Delgadillo
Keywords:
Fin
Self-assembly
Control engineering
Process integration
Engineering
Mechanical engineering
directed self assembly
Computer science
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