Development of Superconducting Multilayer Wiring for Large Arrays of TES X-Ray Microcalorimeters

We are developing TES (Transition Edge Sensor) X-ray Microcalorimeters for future X-ray astronomy missions such as DIOS (Diffuse Intergalactic Oxygen Surveyor). Standard wiring for a large-format array requires narrow and closely-packed configuration. This can cause deleterious crosstalk especially in the Frequency Domain Multiplexing readout. Hence we have employed multilayer wiring technique. In this paper, we tested a deposition of a TES film on the multilayer wiring by sputtering. Our first trial showed that the TES pixels have large residual resistances >50 mΩ and small critical currents of 30 µA).