Simulation-based design of a MEMS X-ray optic for X-ray astronomy

Masaki Koshiishi,Yuichiro Ezoe,Ikuyuki Mitsuishi,Makoto Mita,Kazuhisa Mitsuda,Takayuki Takano,Ryutaro Maeda

Simulation-based design of a MEMS X-ray optic for X-ray astronomy

2008

Masaki Koshiishi
Yuichiro Ezoe
Ikuyuki Mitsuishi
Makoto Mita
Kazuhisa Mitsuda
Takayuki Takano
Ryutaro Maeda

An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.

Keywords:

Adaptive optics
Optoelectronics
Optical imaging
Optics
X-ray optics
Physics
X-ray astronomy
Microelectromechanical systems
X-ray
simulation based design
Computer simulation
Fabrication

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