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Method for producing a sintered body sputtering target and the mold and the sintered body
Method for producing a sintered body sputtering target and the mold and the sintered body
2012
ken'iti itou
masami mesuda
hitosi nagayama
tetuo sibuta ken
syun suke hati tu nami
Keywords:
Sputtering
Materials science
Metallurgy
Mold
Correction
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