Improvement of the critical temperature of NbTiN films on III-nitride substrates

H. Machhadani,Julien Zichi,Catherine Bougerol,Stéphane Lequien,Jean-Luc Thomassin,Nicolas Mollard,Anna Mukhtarova,Val Zwiller,Jean-Michel Gérard,Eva Monroy

Improvement of the critical temperature of NbTiN films on III-nitride substrates

2019

H. Machhadani
Julien Zichi
Catherine Bougerol
Stéphane Lequien
Jean-Luc Thomassin
Nicolas Mollard
Anna Mukhtarova
Val Zwiller
Jean-Michel Gérard
Eva Monroy

In this paper, we study the impact of using III-nitride semiconductors (GaN, AlN) as substrates for ultrathin (11 nm) superconducting films of NbTiN deposited by reactive magnetron sputtering. The ...

Keywords:

Sputtering
Semiconductor
Nitride
Materials science
reactive magnetron
Critical point (thermodynamics)
Optoelectronics
Superconductivity

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