The center for X-ray lithography facility status and beamlines development

Abstract The University of Wisconsin-Madison Center for X-ray Lithography (CXrL) is a national facility for basic and applied research in the field of X-ray lithography operating five beamlines dedicated to X-ray lithography at the University of Wisconsin-Madison Aladdin storage ring. In addition to the beamlines, support facilities for lithographic processing are available. A recent development program with ARPA and Motorola has led to a large increase in the processing and methological facilities available at CXrL. CXrL is in the process of upgrading several key aspects of the facility to accommodate the new equipment and research initiatives. A description of the facility upgrades and a summary of beamlines capabilities, research activities and support facilities is provided.