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Ohmic Contacts to n-type GaAs Using GeMoW Metallizati1on for Self-aliged Processing
Ohmic Contacts to n-type GaAs Using GeMoW Metallizati1on for Self-aliged Processing
1989
C. Dubon-Chevallier
Pierre Henoc
Frank Glas
Yu-Tang Gao
J. F. Bresse
P. Blanconnier
Ch. Besombes
Keywords:
Nursing
Analytical chemistry
Ohmic contact
Secondary ion mass spectrometry
Energy filtered transmission electron microscopy
Transmission electron microscopy
Scanning transmission electron microscopy
Auger electron spectroscopy
Medicine
Electron beam-induced deposition
Contact resistance
Correction
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