Synergetics of surface sputtering by polyatomic ions

The phenomenon of the sputtering of solids under bombardment with molecular ions is considered within the framework of synergetics. The complete sputtering process is divided into three stages with the help of the concept of three successive regimes: the implementation of a dynamic system, the appearance of a statistical system, and the achievement of a completely statistical system. The manifestation of the basic mechanisms is revealed: elastic cascades and mass transfer under the action of shock waves.