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Formation of Magnesium Oxide Thin Films by Reactive Sputtering
Formation of Magnesium Oxide Thin Films by Reactive Sputtering
1998
K. Irie
Shoji Ishibashi
Toshiyuki Nishimura
Hidetoshi Fujii
S. Muraji
Y Shima
H. Hasuyama
Keywords:
Sputtering
Metallurgy
Materials science
Thin film
Magnesium
Inorganic chemistry
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