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The microstructure of U film and Al film prepared by DC magnetron sputtering
The microstructure of U film and Al film prepared by DC magnetron sputtering
2001
Xiang Shikai
Ren Dapeng
Xian Xiaobin
Jiang Gui-fen
Xiao Hong
Keywords:
Electron microscope
Scanning electron microscope
Microstructure
Chemical engineering
Microscopy
Materials science
Sputtering
Transmission electron microscopy
Sputter deposition
Crystal growth
Correction
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