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C-6-6 Deposition of ZnO thin films by reactive magnetron sputtering with a mesh grid electrode
C-6-6 Deposition of ZnO thin films by reactive magnetron sputtering with a mesh grid electrode
2004
Phuong Viet Nguyen
Yuichiro Kuroki
Kanji Yasui
Masasuke Takata
Tadashi Akabane
Keywords:
Sputter deposition
Thin film
Analytical chemistry
Grid
Electrode
Materials science
Deposition (law)
Optoelectronics
mesh grid
reactive magnetron
Sputtering
Correction
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