An installation for magnetron deposition of getter coatings in narrow-aperture chambers

An installation for magnetron sputtering of thin-film coatings has been designed to deposit getter films in extended vacuum structures with a complex aperture. A solenoid used in the installation (diameter, 600 mm; length, 6000 mm; and maximum field, 800 G) makes it possible to deposit materials by sputtering onto internal walls in any type of vacuum chambers employed in modern accelerators. Results of deposition of a TiZrV getter coating in narrow-aperture aluminum vacuum chambers that will be mounted in the damping sections of a PETRA III synchrotron radiation source by DESY (Hamburg, Germany) are presented. The atomic composition and the homogeneity of the film along its length have been investigated on a channel for SR-XRF analysis at the Budker Institute of Nuclear Physics.