Chaotic Signal Generation in the MHz Range with a Monolithic CMOS-MEMS Microbeam Resonator

For the first time, chaotic signal generation with a simple and straight clamped-clamped beam resonator has been experimentally measured. The submicrometric MHz resonator and the readout circuit have been fabricated and monolithically integrated using a commercial $0.35-\mu\mathrm{m}$ CMOS technology. Extensive homoclinic chaotic motion has been obtained from the bistable cc-beam resonator and validated by means of a positive Lyapunov exponent.