Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film

We propose to combine a few known technologies to print TiN quasi-sinusoidal grating using direct photo-patternable TiO2 sol-gel thin layer, enabling to convert by nitridation pure TiO2 dielectric grating to TiN metallic grating. This metamaterial offers an alternative to conventional metals (silver or gold) for plasmonic applications