Nanoindentation characterization of SiC coatings prepared by dynamic ion mixing

Abstract Silicon carbide coatings have been synthesized at 750 °C and at room temperature by ion beam-sputtering of a SiC-target with simultaneous bombardment with a 160-keV Ar + ion beam (dynamic ion mixing). These coatings are studied using a recently developed nanoindentation device in order to determine their hardness and their reduced Young modulus as a function of penetration depth. High hardness values (22–24 GPa) are obtained for the more crystallized coatings deposited at 750 °C, whereas the amorphous ones deposited at room temperature are softer. We discuss the mechanical properties-structure relationship.