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Pattern with a lesser distance in connection with lithographic features
Pattern with a lesser distance in connection with lithographic features
2006
Luan Tran
William T. Rericha
John K. Lee
Ramakanth Alapati
Shahla Honarkhah
Shuang Meng
Puneet Sharma
Jingyi Bai
Zhiping Yin
Paul A. Morgan
Mirzafer Abatchev
Gurtej S. Sandhu
Mark D. Durcan
Keywords:
Geometry
Lithography
Materials science
Optics
Correction
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