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PECULIARITIES OF THE FORMATION OF THIN TANTALUM FILMS PREPARED BY CATHODE SPUTTERING.
PECULIARITIES OF THE FORMATION OF THIN TANTALUM FILMS PREPARED BY CATHODE SPUTTERING.
1972
Ya. S. Umanskii
U.S. Urazaliev
R.D. Ivanov
Keywords:
Sputtering
Microstructure
Crystal structure
Materials science
Cathode
Metallurgy
Tantalum
cathode sputtering
Correction
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