Characterization of Sandwiched MIM Capacitors Under DC and AC Stresses: Al 2 O 3 -HfO 2 -Al 2 O 3 Versus SiO 2 -HfO 2 -SiO 2

In this paper, reliability of the two sandwiched MIM capacitors of (AHA) and (SHS) with hafnium-based dielectrics was analyzed using two kinds of voltage stress; DC and AC voltage stresses. Two MIM capacitors have high capacitance density (8.1 fF/ and 5.2 fF/) over the entire frequency range and low leakage current density of ~1 nA/ at room temperature and 1 V. The charge trapping in the dielectric shows that the relative variation of capacitance () increases and the variation of voltage linearity (/) gradually decreases with stress-time under two types of voltage stress. It is also shown that DC voltage stress induced greater variation of capacitance density and voltage linearity than AC voltage stress.