GHz Plasmonic Broadband ITO MZI Modulator in Si Photonics
2021
Here, we demonstrate a spectrally broadband, GHz-fast Mach-Zehnder-based modulator, showing a small VpL of 95 V-µm, utilizing a 1.4µm-short phase-shifter by heterogeneously integrating ITO films into silicon photonics.
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