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On the fabrication of thin-film artificial metal grid resonator antenna arrays using deep X-ray Lithography
On the fabrication of thin-film artificial metal grid resonator antenna arrays using deep X-ray Lithography
2020
Waqas Mazhar
David M. Klymyshyn
Sven Achenbach
Aqeel A. Quershi
Garth Wells
Michael Jacobs
Keywords:
Optoelectronics
Materials science
Fabrication
Electronic engineering
Thin film
Resonator
metal grid
X-ray lithography
micro fabrication
Millimeter
Correction
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